81. APPLICABILITY OF SEISMIC PROTECTIVE SYSTEMS TO HIGH-TECH INDUSTRIAL STRUCTURES

This paper summarizes a feasibility study for implementing seismic protective systems into high tech industrial structures in which costly vibration sensitive facilities are housed. Micro-vibration control of an IC fab is essential for optimum yield of reliable chip products. This paper describes the micro vibration analysis and measurement of a test structure before and after the incorporation of Seismic Protective systems. Based on the study, it is found that the incorporation of viscous dampers both enhances seismic safety and also minimizes the micro vibration of the structure. Viscous damper seismic isolation is the most promising method to achieve the “fully operational” seismic performance level of an IC fab.